In this paper the oscillations of reflection high-energy electron diffraction is investigated on the basis of the electron complementarity principle and quantum entanglement. The intensity oscillations during the growth process can be explained by the change of the surface morphology, which is caused by the changing of the experimental conditions. The experimental conditions affect both the description of the interaction on the surface and the behavior of the electrons as quantum mechanical entities, i.e., if their particle-like or wave-like properties dominate. The interpretation of these phenomena can be made plausible with the help of the idea of quantum entanglement. © 2011 Elsevier Ltd. All rights reserved.