Topology free structure of scanning electron microscopy images of heat treated, metallized compound semiconductor surfaces are studied using structural entropy based analysis. The scale dependence and the possible superstructures are determined by wavelet transforming the images before the localization type detection. The studied images are taken in-situ during a thermalization experiment, using GaAs as a substrate and gold, zinc and SiO2 layers of 60 to 100 nm thickness. © 2011 Univ of Sarajevo.