High diffraction efficiency optical transmission gratings with quasi-sinusoidal and saw-tooth surface relief profiles were fabricated in Bi12GeO20, Er: LiNbO3 and Er: Fe: LiNbO3 crystals by ion beam implantation. The gratings were directly written by nitrogen ion microbeams at energies of 5 MeV and 10.5 MeV. The finest grating constant was 4 μm. Grating constants for the majority of the gratings were 16 μm. The highest amplitudes of the gratings reached 1600 nm. The highest first-order diffraction efficiency obtained in a sinusoidal grating was 25%, close to the theoretical maximum of 33%. The highest first-order diffraction efficiency of a blazed grating was also 25%, without Littrow optimization. Such gratings can be incorporated into integrated optical biosensors.

Optical transmission gratings with quasi-sinusoidal surface-relief profiles were inscribed in IOG and Pyrex glasses and in Bi12GeO20, Er: LiNbO3, and Er: Fe: LiNbO3 crystals by microbeams of carbon, nitrogen, and oxygen ions at ion energies of 5, 6, and 10.5 MeV. Grating constants were 4, 8, and 16 μm. Amplitudes of the surface-relief gratings were in the 10–2000 nm range. The diffraction efficiency of the gratings was measured at a wavelength of 640 nm. Maximum diffraction efficiencies were close to the theoretical maximum of 33% for thin gratings. Grating profiles were measured by optical microscopic profilometry. Measurement of the diffraction efficiencies at higher orders and Fourier analysis of the grating profiles revealed the dependence of the residual nonlinearity of the grating profiles on the implanted ion fluence. The ion microbeam-written gratings can be used as light coupling elements in integrated optics for sensors and telecommunication.