Optical transmission gratings with quasi-sinusoidal surface-relief profiles were inscribed in IOG and Pyrex glasses and in Bi12GeO20, Er: LiNbO3, and Er: Fe: LiNbO3 crystals by microbeams of carbon, nitrogen, and oxygen ions at ion energies of 5, 6, and 10.5 MeV. Grating constants were 4, 8, and 16 μm. Amplitudes of the surface-relief gratings were in the 10–2000 nm range. The diffraction efficiency of the gratings was measured at a wavelength of 640 nm. Maximum diffraction efficiencies were close to the theoretical maximum of 33% for thin gratings. Grating profiles were measured by optical microscopic profilometry. Measurement of the diffraction efficiencies at higher orders and Fourier analysis of the grating profiles revealed the dependence of the residual nonlinearity of the grating profiles on the implanted ion fluence. The ion microbeam-written gratings can be used as light coupling elements in integrated optics for sensors and telecommunication.